COOLVAC CL

Cryo pumps are gas entrapment vacuum pumps for the ultra high vacuum range. The principle of operation is that gaseous substances are bound to the cold surfaces within the pump by means of cryocondensation. Cryo pump is especially effective for pumping gases such as nitrogen, hydrogen or helium.


Product Category : High Vacuum Pumps

Description

COOLVAC vacuum pumps are refrigerator cryo pumps which generate a vacuum when gaseous substances are bound to the cold surfaces within the pump by means of cryocondensation. Because of the pumping principle COOLVAC cryo pumps have a high effective pumping speed for all gases. COOLVAC vacuum pumps produce a hydro carbon free ultra high vacuum in the pressure range from 10-3 mbar to 10-11 mbar (0.75•10-3 to 0.75•10-11 Torr).

Advantages to the User
–  Hydrocarbon-free high vacuum
–  High capacity for argon and hydrogen
–  High crossover value
–  Simple operation
–  Trouble-free integration into  complex systems
–  Fully automatic regeneration through Cryo Compact Control
–  Easy servicing

Typical Applications
–  Lamps and tubes manufacture
–  Transfer chambers / Loadlock
–  General research
–  Evaporators
–  Sputtering systems
–  Ion implanters
–  Optical coating systems
–  Metallization systems

For more detailed specifications of Oerlikon Leybold COOLVAC CL, please feel free to Contact Us.
We at Leybold Vacuum Pump Indonesia are more than pleased to discuss about your process and to provide full knowledge about what is the best for your needs.

Specification

Pressure range 10-3 mbar to 10-11 mbar